New VMZ-R Features Include New zooming heads Type 4 and A, new stage strokes 450×400mm, cover your applications with a wider range. New zooming heads Type 4 Newly designed with optical magnification 4 to 60×, twice the magnification than that of type 3, where a high N.A. 0.46 and a long working distance of 30mm are combined. Ideal for high density specimen with tiny features to measure. Type A Type A optical head has gained an excellent reputation with the VMA-2520 since 2007. It has an extremely long working distance of 73.5mm, making it comfortable and safe to work with. It also has an extremely wide FOV max. 13.3×10mm. Good for many low density specimen with big steps, deep holes, tall bosses, etc. High density PCB (optical magnification 16×) Plastic molded part (optical magnification 0.35×) Middle XY stage strokes and an extended Z stroke Type 1, 2 and 3 are equipped with 8 segment LED inner and outer ring illuminators enabling you to make the best illumination for making obscure edges stand out. You have a choice from 3 oblique angles, 37, 55 and 75 degrees, from any directions of 8 segments and combination of any segments and using any light intensity. Measurement of a 300mm wafer Measurement of a large PCB New TTL Laser AF (TTL - Through the lens) New TTL Laser AF can now detect 2 Laser beams reflected, one from top surface of an upper transparent layer, the other from its bottom surface or from the top surface of the second layer. Consequently, it can measure thickness of the transparent layer or depth to top surface of the second layer. Laser AF now has a new mode to make the optical head stop exactly Focus on top surface in red on focus point and cease any further movement, passing or returning to Focus on bottom surface in blue focus point, for reducing measuring time. New TTL Laser AF It can detect 2 Laser beams reflected on 2 different surfaces. Transparent layer Substrate Software with new GUI 0.1mm glass plate at 8× optical magnification of Type 2 zooming head NEXIV software is renewed with new GUI featuring Main Window, from which you can make or run teaching files, verify results or make various calibrations. With various wizards, you can make teaching files more easily in shorter time. It is equipped with NEXIV Profiler and NEXIV Report software. Please refer to page 11 and 12 for more details of the software. 4 8 segment LED inner and outer ring illuminators Type 1, 2 and 3 are equipped with 8 segment LED inner and outer ring illuminators, achieving the best illumination possible, revealing obscure edges stand out. You have a choice from 3 oblique angles, 37, 55 and 75 degrees, from any directions of 8 segments and combination of any segments and using any light intensity. ˃ W.D.: 50mm LED inner ring light ˃ W.D.: 36mm LED outer ring light at 55 degree position ˃ W.D.: 10mm LED outer ring light at 78 degree position ˃ Plastic molded part (optical magnification 4×) Coaxial top light LED inner ring light Other new features LED outer ring light at 55 degree position LED outer ring light at 78 degree position Improvement of uncertainty Nikon's new linear encoder “ModuRay” featuring a non-contact reading head that contributes to greater certainty. Higher throughput Higher data transferring speed and adoption of LED light source, that can change its intensity in a moment, compared with halogen lamp, resulting in higher throughput. LED light source for all illuminators LED light source is newly adopted for episcopic and diascopic illuminators giving top and bottom lights. LED light source features a short time for changing its intensity, a stable high color temperature regardless of its intensity, a long life and a low consumption of electric power in comparison with halogen lamp. Thus, LED light source brings you shorter measurement time and lower cost of ownership. XGA camera option You now have a choice of XGA camera with 1024 × 768 pixels in addition to conventional VGA camera with 640 × 480 pixels. XGA camera is for getting high resolution images for visual inspection, documentation, etc. Uncertainties of systems specified in this brochure are guaranteed with both VGA and XGA cameras. New joystick box Z axis fine movement buttons are newly added on top of the joystick lever for XY axis movement and rotating knob for Z axis movement as wells as 3 buttons to which your favorite 3 functions can be assign. 5
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